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UHVCVD

1 abbreviation

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Materjalitehnika terminibaas

ID 670344 Last modified 04.01.2026
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Domain surface treatment - corrosion protection
ülikõrgvaakumis keemiline aursadestuspindamine preferred
keemiline aursadestus ülikõrgvaakumis
ultrahigh vacuum chemical vapor deposition
ultrahigh vacuum CVD
  • keemiline aursadestuspindamine väga madalal rõhul, taval. madalamal kui 10-6 Pa (ca 10-8 mmHg) (vt keemiline aursadestus)
  • chemical vapor deposition at very low pressure (lower 10-6 Pa) (see: chemical vapor deposition)
ülikõrgvaakumis keemiline aursadestuspindamine preferred
keemiline aursadestus ülikõrgvaakumis
ultrahigh vacuum chemical vapor deposition
Good to know
  • abbreviation UHVCVD
ultrahigh vacuum CVD
UHVCVD abbreviation

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