en

angle-resolved scanning electron microscopy

1

Terminological databases

Metroloogia terminibaas

ID 1143092 Last modified 29.01.2026
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Domain metrologymeasuring procedures
nurgalahutusega skanniv elektronmikroskoopia
SEM
angle-resolved scanning electron microscopy
SEM
  • pinnatopograafia mõõtemeetod, mille puhul pinna lokaalsed konarused hinnatakse peegelduse nurkjaotuse või sekundaarse elektronkiirguse intensiivsuse abil ja pinnatopograafia kujutis saadakse nende kohalike pinnakonaruste integreerimise teel
  • surface topography measurement method whereby local gradients of a surface are determined by angular distribution of reflection or secondary electron emission intensity and an areal-topography image is obtained by integration of these local gradients
nurgalahutusega skanniv elektronmikroskoopia
Usage examples
  • Nurgalahutusega skanniva elektronmikroskoopia korral kogutakse katoodiluminestsentsi emissioon paraboloidpeeglisse tulevast täiskiirest ja iga saadud pildi punkt vastab ainulaadsele emissiooninurgale.
SEM abbreviation
angle-resolved scanning electron microscopy
Usage examples
  • In angle-resolved scanning electron microscopy, the cathodoluminescence emission is collected from the full beam incident on a paraboloid mirror, and each point in the resulting image corresponds to a unique emission angle.
SEM abbreviation

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