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keemiline aursadestuspindamine väga madalal rõhul, taval. madalamal kui 10-6 Pa (ca 10-8 mmHg) (vt keemiline aursadestus), chemical vapor deposition at very low pressure (lower 10-6 Pa) (see: chemical vapor deposition)
ülikõrgvaakum-CVD . Materjalitehnika terminibaas. Estonian Language Institute, Sõnaveeb 2026. https://sonaveeb.ee/search/unif//mtr/%C3%BClik%C3%B5rgvaakum-CVD/1/est (17.07.2026)
