en

ion-beam sputtering

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Materjalitehnika terminibaas

ID 1124216 Last modified 02.07.2026
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Domain surface treatment - corrosion protectionnanomaterialsgas mechanics - vacuum physics
  • ioonpindamismeetod, mille korral märklauale suunatud argooni või ksenooni ioonkiirte vooga atomiseeritud materjal suunatakse alusmaterjalile; viimaste küllaldasest energiast tingituna saadakse pinde hea adhesioon alusmaterjaliga (vt ioonimplantatsioon; vrd ioonkiirtoetatud sadestus, ioonkiirsegamine, ionplasmasadestus)
  • an ion implantation technique in which an ion beam of argon or xenon directed at a target sputters material from the target to a substrate; the sputtered material arrives at the substrate with enough energy to promote good adhesion of the coating to substrate (see: ion implantation; compare: ion beam assisted deposition, ion beam mixing, plasma ion deposition)
ion beam sputtering preferred

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