kile, mis on tehtud alusmaterjaliga samast materjalist ja mille orientatsioon on alusmaterjaliga sama (vt epitaksiaalkile; vrd heteroepitaksiaalkile)
film made of the same material as the substrate, owing to epitaxy, its orientation is the same as that of the substrate (see: epitaxial film; compare: heteroepitaxial film)
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