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epitaksiaalkile, mille koostis või kristalliline struktuur erineb alusmaterjali omast (vt epitaksiaalkile; vrd homoepitaksiaalkile), epitaxial film whose composition or crystal structure differs from those of the substrate (see: epitaxial film; compare: homoepitaxial film)
heteroepitaksiaalkile . Materjalitehnika terminibaas. Estonian Language Institute, Sõnaveeb 2026. https://sonaveeb.ee/search/unif//mtr/heteroepitaksiaalkile/1/est (20.08.2026)
