materjalide väga väikeste piirkondade uurimismeetod, mis põhineb fokuseeritud elektronkiire toimel emiteerunud röntgenkiirguse analüüsil, määramaks keemiliste elementide koostist ja kogust (vt mikroanalüüs; vrd elektronspektroskoopia)
a method for analysing a very tiny amount of material by bombarding it with a finely focussed beam of electrons and then recording the resultant X-ray emission spectrum which is analysed for type and amount of elements present (see: microanalysis; compare: electron spectroscopy)
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