andmetöötluse algoritm, sealhulgas matemaatilised võrrandid, mis on kasutusel mõõteobjekti pinna topograafia arvutamiseks kahe või enama digiteeritud interferentsipildi põhjal kontrollitud faasinihete olemasolul
algorithm for data processing, including the mathematical equations, used to calculate the topography from two or more digitized interference images acquence of controlled phase shifts
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