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density of impurity atoms, such as boron or phosphorus, in a semiconductor wafer, kontsentratsioon, mis iseloomustab lisandiaatomite, nagu boor või fosfor, tihedusele pooljuhtplaadis
impurity concentration . Metroloogia terminibaas. Estonian Language Institute, Sõnaveeb 2026. https://sonaveeb.ee/search/unif//mea/impurity%20concentration/1/eng (11.07.2026)
