Fookusmuute mõõtealgoritm töötab järgmiselt: esmalt jäädvustatakse erineva fookusega mõõteobjekti pinnatopograafiaomaste punktide pildid, milleks liigutatakse mõõteobjekti või optikaseadet teineteise suhtes, mille järel arvutatakse iga positsiooni jaoks fookus iga pinnatopograafia punkti kohal.
The focus variation measurement algorithm works as follows: first, images of points on the surface topography of the measurement object with different focuses are captured, for which the measurement object or optical device is moved relative to each other, after which the focus is calculated for each position at each point on the surface topography.
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