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focus variation instrument requirements

1 plural

Terminological databases

Metroloogia terminibaas

ID 1158637 Last modified 10.06.2026
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Domain metrologymeasuring instruments
muutfookusmõõtevahendi nõuded preferred
focus variation instrument requirements
  • nõuded mõõtevahendile, mis teostab proovipinna pindala topograafilist mõõtmist fookusvariatsiooni abil ning mis koosneb muutfookustajurist, optikast, muutfookus valgustussüsteemist ja telgskannerist
  • requirements for instrument that shall perform areal surface topography measurements of a sample surface using focus variation, and shall comprise a focus variation sensor, optics, focus variation illumination system, and an axial scanner
muutfookusmõõtevahendi nõuded preferred
Usage examples
  • Muutfookusmõõtevahendi nõuded peavad võimaldama andmete hankimiseks valgustama pinda teatud nurkvalgustuse vahemikuga ja jäädvustama andmeid tuvastusnurga vahemikust mitmes telgasendis piki optilist telge, tehes telgskannimist skannimispikkuse ulatuses.
focus variation instrument requirements
Usage examples
  • Focus variation instrument requirements shall to enable acquire data by illuminating the surface with an angular range of illumination and capturing data from angular range of detection at several axial posiltions along the optical axis by performing an axial scan over an axial scan length.
instrument requirements

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