Elektronmikrosondanalüsaator arenes välja kahest tehnikast: elektronmikroskoobist, mis kasutab fokuseeritud kõrge energiaga elektronkiirt sihtmaterjali mõjutamiseks, ja röntgenspektroskoobist, mis tuvastab elektronkiire löögist hajutatud footonid koos footonite energia/lainepikkusega, mis on iseloomulik intsidentelektronide poolt ergastatud aatomitele.
The electron probe microanalyzer developed from two technologies: electron microscopy — using a focused high energy electron beam to impact a target material, and X-ray spectroscopy — identification of the photons scattered from the electron beam impact, with the energy/wavelength of the photons characteristic of the atoms excited by the incident electrons.
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