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the number of particles sputtered from the surface of a target per primary ion, ühe primaariooni kohta märklaudpinnast välja löödud osakeste arv
sputter yield . Keemiaterminite baas. Estonian Language Institute, Sõnaveeb 2026. https://sonaveeb.ee/search/unif//kem/sputter%20yield/1/eng (02.08.2026)
