et

vaakumsadestus

1

Terminological databases

EKI terminibaas Esterm

ID 722460 Last modified 30.12.2004
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Domain electricity & magnetism
  • technique for the deposition of thin films of metal or other materials on the surface of small objects; evaporation from a boiling source in a hard vacuum to deposit source material on any substrate placed within the vacuum chamber and exposed to the flow of material
vacuum deposition

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