a bombardment of a source material by positive ions of an inert gas in order to erode the source surface, the eroded material travelling through a low-pressure gas and depositing on any object in its , ejection of atoms from a solid target surface due to impact with impinging ions from a plasma, the non-thermal removal of atoms from a surface under energetic ion bombardment. Sputtering yields are strongly dependent on the ion and its energy but rise steadily from thresholds at a few eV to sev, katoodi materjali purunemine ja tolmustumine gaaslahenduse puhul positiivsete ioonide mõjul. Gaaslahendusseadistes on katoodi pihustumine kahjulik nähtus. Katoodi pihustumist rakendatakse õhukeste met