8514 10 05 (a) - - For the manufacture of semiconductor devices on semiconductor wafers
Semiconductor device processing - methods by which various layers of material are grown and deposited and dopants introduced in controlled quantities into selected areas of the surface of a semiconductor wafer, which may be several centimetres diameter but at scale as small as one micrometre. Almost always involves etching a pattern of the wafer surface by photolithography followed by epitaxial growth of the active semiconductor.
