skaneeriv elektronmikroskoopia, mis võimaldab saada kolmemõõtmelise pinnakujutise teravatipulise mehaanilise sondi abil (vt tunnelmikroskoopia), an method for study the surfaces at the nanoscale level with a physical probe that scans the specimen: a comprehensive term encompassing the family of local probing techniques such as scanning tunneling microscope, atomic force microscope (see: scanning tunneling microscopy)