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sensor that is forme by a capacitor consisting of a polysilicon membrane and a silicon substrate, tajur, mis on moodustatud kondensaatorist, mis koosneb polüräni membraanist ja ränisubstraadist
ränisensor . Metroloogia terminibaas. Estonian Language Institute, Sõnaveeb 2026. https://sonaveeb.ee/search/unif//mea/r%C3%A4nisensor/1/est (16.07.2026)
