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optical differential profiling

1

Terminological databases

Metroloogia terminibaas

ID 1143074 Last modified 29.01.2026
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Domain metrologymeasuring procedures
  • pinnatopograafia mõõtemeetod, mille puhul mõõdetakse pinna kahe tihedalt asetseva punkti kõrguste erinevusi tihedalt üksteise järel piki liikumissuunda ja saadakse pinnaprofiil nende kohalike kõrguste erinevuste integreerimise teel
  • surface topography measurement method whereby height differences between two closely spaced points on a surface are measured in close succession along the direction of traverse and a surface profile is obtained by integration of these local height differences
optiline vaheprofileerimine
Usage examples
  • Optiline vaheprofileerimine on faasikvadratuuri diferentsiaalinterferentsil põhinev optiline pinnaprofiilide tekitamise süsteem.
optical differential profiling
Usage examples
  • Optical differential profiling is an optical surface profiling system based on phase quadrature differential interference.

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