Kilemõõtur võimaldab mõõta kantava kilekihi paksust mitte ainult pärast selle valmimist, vaid ka sadestamise käigus, kusjuures mõned mõõturid suudavad lisaks reguleerida kas kilekihi lõplikku paksust, sadestamiskiirust või mõlemat.
A thin-film thickness monitor can measure the thickness of a thin film, not only after it has been made, but while it is still being deposited, and some can control either the final thickness of the film, the rate at which it is deposited, or both.
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