Puhtustegur iseloomustab mikrotootmine puhasruume ja mõõtühiku etalonlaboreid, kus õhk on filtreeritud osakestega (mikromeetriliste mõõtmetega suits, tolm, bakterid ja rakud) saastumisest ning temperatuur, niiskus, vibratsioon ja elektrilised häired on range monitoorngu all.
Coefficient of cleanliness is inherent of cleanrooms, where air has been filtered of particle contamination and temperature, humidity, vibrations and electrical disturbances are under stringent control.
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