modulating portion of the coherence scanning interferometry signal, related to the interference effect and generated by the variation of otical path length during the coherence scanning interferometry scan, koherentsustskanniva interferentsmeetodi signaali moduleeriv osa, mis on seotud interferentsefektiga ja mis tekib optilise tee pikkuse muutumisel koherentsustskanniva interferentsmeetodiga skannimise ajal