Saturated silicon-oxygen hydrides with unbranched or branched chains of alternating silicon and oxygen atoms (each silicon atom is separated from its nearest silicon neighbours by single oxygen atoms). The general structure of unbranched siloxanes is H3Si[OSiH2]nOSiH3., Küllastatud räni-hapnikhüdriidid, mille hargnemata või hargnenud ahelad koosnevad vahelduvatest räni ja hapniku aatomitest. Üldvalem hargnemata siloksaanide jaoks on H3Si[OSiH2]nOSiH3.
