Glass-plate substrates, coated with a dielectric thin film, and of a semiconductor grade in accordance with SEMII-standards ... Manufacture from non-coated glass-plate substrate of heading No 7006.
SEMI D24-0200 - Specification for Glass Substrates Used to Manufacture Flat Panel Displays
This standard specifies selected geometrical requirements of glass substrates used to manufacture flat panel displays. This standard is intended to set levels of specification for glass substrates to insure repeatable manufacture of flat panel displays and uniformity of substrates from all vendors. This standard will also insure inter-changeability at all mechanical interfaces within process tools as well as with Transportation and Automation Cassettes.
