SEMI STANDARDS (Semiconductor Equipment and Materials Institute, Incorporated standards). These standards, published since 1977, recommend unification of standards for equipment and materials required in semiconductor production in the six fields of chemistry, equipment, materials, packages, photomasks, and safety., SEMI - Semiconductor Equipment and Materials Institute, mitteametlikud (de facto) standardid, mida kasutatakse pooljuhtseadiste tööstuses, Pooljuhtide Tööstuse Seadmete ja Materjalide Instituut